Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513134 | Semiconductor device producing method | Mitsuhiro Omura, Yumi Ohno, Tokuhisa Ohiwa | 2013-08-20 |
| 7943459 | Semiconductor device and method of manufacturing the semiconductor device | Kazutaka Akiyama | 2011-05-17 |
| 7232763 | Method of manufacturing semiconductor device | Mitsuhiro Omura, Makiko Katano, Shoko Ito, Hisashi Kaneko | 2007-06-19 |
| 6627557 | Semiconductor device and method for manufacturing the same | Shoji Seta | 2003-09-30 |
| 5851641 | Electrostatic chucking device | Tadao Matsunaga, Kei Hattori | 1998-12-22 |
| 5645921 | Electrostatic chucking device | Tadao Matsunaga, Kei Hattori | 1997-07-08 |
| 5595627 | Plasma etching method | Koichiro Inazawa, Shin Okamoto, Hisataka Hayashi | 1997-01-21 |
| 5356515 | Dry etching method | Yoshifumi Tahara, Yoshihisa Hirano, Masahiro Ogasawara, Isahiro Hasegawa, Keiji Horioka | 1994-10-18 |
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Haruo Okano, Isahiro Hasegawa +1 more | 1994-05-10 |
| 5271788 | Plasma processing apparatus | Makoto Hasegawa, Keiji Horioka, Isahiro Hasegawa, Toshihisa Nozawa, Yoshio Ishikawa +2 more | 1993-12-21 |