Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734985 | Analytical apparatus, sample holder and analytical method | Haruko Akutsu, Akira KURAMOTO | 2017-08-15 |
| 8932954 | Impurity analysis device and method | Yuji Yamada, Chikashi Takeuchi, Tomoyo Naito | 2015-01-13 |
| 8771535 | Sample contamination method | Yuji Yamada, Ayako Mizuno, Eri UEMURA, Asuka Uchinuno, Chikashi Takeuchi | 2014-07-08 |
| 8119020 | Method for manufacturing electronic device | Shoko Ito, Atsuko Kawasaki, Masahiro Kiyotoshi | 2012-02-21 |
| 7889313 | Immersion lithography apparatus and exposure method | Takuya Kono, Ayako Mizuno | 2011-02-15 |
| 7232763 | Method of manufacturing semiconductor device | Mitsuhiro Omura, Shoko Ito, Takaya Matsushita, Hisashi Kaneko | 2007-06-19 |
| 6284020 | Method of maintaining cleanliness of substrates and box for accommodating substrates | Ayako Mizuno, Katsuya Okumura | 2001-09-04 |