Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962519 | Analysis pretreatment device | Jiahong WU, Yuji Yamada | 2021-03-30 |
| 9658203 | Metal collection solution and method of analyzing substrate contamination | Jiahong WU, Yuji Yamada | 2017-05-23 |
| 8771535 | Sample contamination method | Yuji Yamada, Makiko Katano, Eri UEMURA, Asuka Uchinuno, Chikashi Takeuchi | 2014-07-08 |
| 7889313 | Immersion lithography apparatus and exposure method | Makiko Katano, Takuya Kono | 2011-02-15 |
| 7850752 | Semiconductor manufacturing system and method of manufacturing semiconductor device | Hiroshi Tomita | 2010-12-14 |
| 6284020 | Method of maintaining cleanliness of substrates and box for accommodating substrates | Makiko Katano, Katsuya Okumura | 2001-09-04 |