Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508556 | Plasma processing apparatus | Taro Ikeda, Jun NAKAGOMI, Kei Nagayosi | 2022-11-22 |
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Yuki Osada, Hiroyuki Miyashita, Susumu Saito, Kazuhiro Furuki +2 more | 2021-11-02 |
| 10804078 | Plasma processing apparatus and gas introduction mechanism | Yutaka Fujino, Taro Ikeda, Jun NAKAGOMI, Takeo Wakutsu | 2020-10-13 |
| 10727030 | Microwave plasma source and plasma processing apparatus | Taro Ikeda | 2020-07-28 |
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Taro Ikeda, Shigeru Kasai, Emiko HARA, Yutaka Fujino, Yuki Osada +1 more | 2020-02-11 |
| 10211032 | Microwave plasma source and plasma processing apparatus | Taro Ikeda, Yutaka Fujino | 2019-02-19 |
| 9991097 | Plasma processing apparatus | Shigenori Ozaki, Yutaka Fujino, Jun NAKAGOMI | 2018-06-05 |
| 9552966 | Antenna for plasma generation, plasma processing apparatus and plasma processing method | Taro Ikeda, Shigeru Kasai | 2017-01-24 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9543123 | Plasma processing apparatus and plasma generation antenna | Taro Ikeda, Shigeru Kasai | 2017-01-10 |
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Taro Ikeda, Hiroyuki Miyashita, Yuki Osada, Yutaka Fujino | 2016-12-13 |
| 8334481 | Mounting table structure, and processing apparatus | Hirohiko Yamamoto, Daisuke Toriya | 2012-12-18 |
| 8203104 | Mounting table structure and heat treatment apparatus | — | 2012-06-19 |
| 8055125 | Substrate stage mechanism and substrate processing apparatus | — | 2011-11-08 |
| D601521 | Heater for manufacturing semiconductor | — | 2009-10-06 |
| D589471 | Heater for manufacturing semiconductor | — | 2009-03-31 |
| 7488374 | Trapping device, processing system, and method removing impurities | — | 2009-02-10 |
| 7299566 | Substrate-placing mechanism having substrate-heating function | — | 2007-11-27 |