Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702847 | Phase shift photomask, phase shift photomask blank, and process for fabricating them | Hiroyuki Miyashita, Yukio Iimura, Koichi Mikami | 1997-12-30 |
| 5556724 | Phase shift photomask and method of producing same | Hiroyuki Inomata, Takashi Tominaga | 1996-09-17 |