Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634990 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Yasutaka Morikawa, Katsuya Hayano | 2020-04-28 |
| 10394118 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Yasutaka Morikawa, Katsuya Hayano | 2019-08-27 |
| 10048580 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Yasutaka Morikawa, Katsuya Hayano | 2018-08-14 |
| 9519211 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Yasutaka Morikawa, Katsuya Hayano | 2016-12-13 |
| 8974987 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Hideyoshi Takamizawa, Yasutaka Morikawa, Katsuya Hayano | 2015-03-10 |
| 8124301 | Gradated photomask and its fabrication process | Junji Fujikawa, Shu Shimada, Yuuichi Yoshida, Shiho Sasaki, Tsuyoshi Amano +2 more | 2012-02-28 |
| 6764792 | Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it | Junji Fujikawa, Yoshinori Kinase, Takafumi Okamura, Toshifumi Yokoyama, Haruo Kokubo | 2004-07-20 |
| 6709791 | Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this | Toshiaki Motonaga, Chiaki Hatsuta, Norihito Ito, Naoya Hayashi, Toshio Onodera +3 more | 2004-03-23 |
| 6493013 | Method for recording and reproducing information, apparatus therefor and recording medium | Hiroyuki Obata, Takashi Aono, Masato Koike, Hideaki Amano, Norikazu Saito +5 more | 2002-12-10 |
| 6458496 | Blank for halftone phase shift photomask and halftone phase shift photomask | Toshiaki Motonaga, Toshifumi Yokoyama, Takafumi Okamura, Yoshinori Kinase, Junji Fujikawa +4 more | 2002-10-01 |
| 5983057 | Color imaging system with selectively openable optical shutter | Makoto Matsuo, Minoru Utsumi, Chihaya Ogusu, Shunsuke Mukasa, Yoshiaki Kudo +5 more | 1999-11-09 |
| 5972543 | Phase shift mask and method of producing the same | Toshifumi Yokoyama, Koichi Mikami, Chiaki Hatsuda | 1999-10-26 |
| 5916712 | Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same | Hiroyuki Miyashita, Masahiro Takahashi, Naoya Hayashi | 1999-06-29 |
| 5811208 | Phase shift mask and method of producing the same | Toshifumi Yokoyama, Koichi Mikami, Chiaki Hatsuda | 1998-09-22 |
| 5738959 | Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same comprising fluorine in phase shift layer | Hiroyuki Miyashita, Masahiro Takahashi, Naoya Hayashi | 1998-04-14 |
| 5721075 | Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them | Keiji Hashimoto, Junji Fujikawa, Masahiro Takahashi, Hiroyuki Miyashita, Yukio Iimura | 1998-02-24 |
| 5708062 | Bitumen compositions | Jerome Maillet, Jacques Komornicki, Yoshiyuki Miyaki, Satoshi Tada, Patrice Perret +3 more | 1998-01-13 |
| 5638103 | Method for recording and reproducing information, apparatus therefor and recording medium | Hiroyuki Obata, Takashi Aono, Masato Koike, Hideaki Amano, Norikazu Saito +5 more | 1997-06-10 |
| 5614335 | Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them | Keiji Hashimoto, Junji Fujikawa, Masahiro Takahashi, Hiroyuki Miyashita, Yukio Iimura | 1997-03-25 |
| 5576123 | Overlying shifter type phase shift photomask blank, overlying shifter type phase shift photomask and methods of producing them | Hiroyuki Miyashita | 1996-11-19 |
| 5561009 | Blanks for phase shift photomasks, and phase shift photomasks | Masahiro Takahashi, Jiro Takei, Sachiko Ishikita, Hiroyuki Miyashita | 1996-10-01 |
| 5538816 | Halftone phase shift photomask, halftone phase shift photomask blank, and methods of producing the same | Keiji Hashimoto, Junji Fujikawa, Masahiro Takahashi, Hiroyuki Miyashita, Yukio Iimura | 1996-07-23 |
| 5419988 | Photomask blank and phase shift photomask | Keiji Hashimoto, Masahiro Takahashi, Wataru GOTO, Yukio Iimura | 1995-05-30 |
| 5380608 | Phase shift photomask comprising a layer of aluminum oxide with magnesium oxide | Hiroyuki Miyashita, Masahiro Takahashi | 1995-01-10 |
| 5161233 | Method for recording and reproducing information, apparatus therefor and recording medium | Makoto Matsuo, Minoru Utsumi, Chihaya Ogusu, Shunsuke Mukasa, Yoshiaki Kudo +5 more | 1992-11-03 |