Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971238 | Mask blank, phase shift mask, and production method thereof | Hiroshi Watanabe, Katsuya Hayano, Youhei Ohkawa, Takashi Adachi, Ayako Tani +1 more | 2018-05-15 |
| 9874808 | Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using same | Takashi Adachi, Youichi Miura, Katsuya Hayano, Youhei Ohkawa, Hiroshi Watanabe +1 more | 2018-01-23 |
| 8974987 | Photomask and methods for manufacturing and correcting photomask | Takaharu Nagai, Hiroshi Mohri, Yasutaka Morikawa, Katsuya Hayano | 2015-03-10 |