Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604060 | Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting | Hiroyuki Miyashita, Koichi Mikami | 1997-02-18 |
| 5561009 | Blanks for phase shift photomasks, and phase shift photomasks | Hiroshi Mohri, Masahiro Takahashi, Jiro Takei, Hiroyuki Miyashita | 1996-10-01 |