Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933082 | Photomask with dust-proofing device and exposure method using the same | Hiro-o Nakagawa | 2005-08-23 |
| 6869736 | Halftone phase shift photomask and blank for halftone phase shift photomask | Hiro-o Nakagawa, Yoshinori Kinase, Satoshi Yusa, Shigeki Sumida, Toshifumi Yokoyama +3 more | 2005-03-22 |
| 6780547 | Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask | Norihito Ito, Chiaki Hatsuta, Junji Fujikawa, Naoya Hayashi, Toshio Onodera +3 more | 2004-08-24 |
| 6740455 | Photomask | Kenji Noguchi, Hiro-o Nakagawa, Yasutaka Morikawa, Toshifumi Yokoyama, Takashi Tominaga +3 more | 2004-05-25 |
| 6709791 | Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this | Hiroshi Mohri, Chiaki Hatsuta, Norihito Ito, Naoya Hayashi, Toshio Onodera +3 more | 2004-03-23 |
| 6599667 | Halftone phase shift photomask and blank for halftone phase shift photomask | Satoshi Yusa, Toshifumi Yokoyama, Shigeki Sumida, Yoshinori Kinase, Hiro-o Nakagawa +3 more | 2003-07-29 |
| 6458496 | Blank for halftone phase shift photomask and halftone phase shift photomask | Toshifumi Yokoyama, Takafumi Okamura, Yoshinori Kinase, Hiroshi Mohri, Junji Fujikawa +4 more | 2002-10-01 |