Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869736 | Halftone phase shift photomask and blank for halftone phase shift photomask | Hiro-o Nakagawa, Toshiaki Motonaga, Yoshinori Kinase, Satoshi Yusa, Toshifumi Yokoyama +3 more | 2005-03-22 |
| 6599667 | Halftone phase shift photomask and blank for halftone phase shift photomask | Satoshi Yusa, Toshifumi Yokoyama, Toshiaki Motonaga, Yoshinori Kinase, Hiro-o Nakagawa +3 more | 2003-07-29 |
| 6458496 | Blank for halftone phase shift photomask and halftone phase shift photomask | Toshiaki Motonaga, Toshifumi Yokoyama, Takafumi Okamura, Yoshinori Kinase, Hiroshi Mohri +4 more | 2002-10-01 |