Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7056624 | Methods of manufacturing phase shift masks having etched substrate shifters with sidewalls rounded at top and bottom corners | — | 2006-06-06 |
| 6764792 | Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it | Junji Fujikawa, Yoshinori Kinase, Takafumi Okamura, Hiroshi Mohri, Toshifumi Yokoyama | 2004-07-20 |
| 6627359 | Phase-shift photomask manufacturing method and phase-shift photomask | — | 2003-09-30 |