Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5972543 | Phase shift mask and method of producing the same | Toshifumi Yokoyama, Koichi Mikami, Hiroshi Mohri | 1999-10-26 |
| 5811208 | Phase shift mask and method of producing the same | Toshifumi Yokoyama, Koichi Mikami, Hiroshi Mohri | 1998-09-22 |