Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7422892 | Enzyme-based device for environmental monitoring | Keith E. LeJeune, Richard J. Mysliwczyk, Markus Erbeldinger | 2008-09-09 |
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Mark Meloni, Robert A. Eaton | 2005-11-01 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Mark Meloni, Robert A. Eaton | 2004-10-19 |
| 6371838 | Polishing pad conditioning device with cutting elements | — | 2002-04-16 |
| 6350184 | Polishing pad conditioning device with cutting elements | — | 2002-02-26 |
| 6347981 | Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride | — | 2002-02-19 |
| 6347982 | Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitride | — | 2002-02-19 |
| 6217410 | Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing | Andrew Michael Yednak, III, John Natalicio, Chad Goudie | 2001-04-17 |
| 5993289 | Methods for the in-process detection of workpieces in a CMP environment | Robert F. Allen, Anthony L. Bartels, Warren Lin | 1999-11-30 |
| 5961369 | Methods for the in-process detection of workpieces with a monochromatic light source | Anthony L. Bartels, Robert F. Allen, Warren Lin | 1999-10-05 |
| 5958148 | Method for cleaning workpiece surfaces and monitoring probes during workpiece processing | Andrew Michael Yednak, III, John Natalicio, Chad Goudie | 1999-09-28 |
| 5872633 | Methods and apparatus for detecting removal of thin film layers during planarization | James C. Schlueter, Chris Karlsrud, Warren Lin | 1999-02-16 |
| 5842912 | Apparatus for conditioning polishing pads utilizing brazed diamond technology | Thomas K. Crosby, Richard J. Kruse, Larry Biddlingmeier, Jim Schlueter | 1998-12-01 |
| 5823853 | Apparatus for the in-process detection of workpieces with a monochromatic light source | Anthony L. Bartels, Robert F. Allen, Warren Lin | 1998-10-20 |
| 5733171 | Apparatus for the in-process detection of workpieces in a CMP environment | Robert F. Allen, Anthony L. Bartels, Warren Lin | 1998-03-31 |