Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050193 | Magnesium ion selective membranes | Thomas Pedersen Nygaard, Palle Schneider, Peter Jakobsen Neilson, Thomas Steen HANSEN | 2024-07-30 |
| 9019466 | Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system | Martinus Hendrikus Antonius Leenders, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Robert Douglas Watso, Anthonius Martinus Cornelis Petrus De Jong +1 more | 2015-04-28 |
| 8042497 | Steam generator arrangement | Eric Warren, Kevin A. Larson, Christopher J. Thompson, Shan A. Shanmugavel | 2011-10-25 |
| 7887396 | Method and apparatus for controlled slurry distribution | Guangying Zhang | 2011-02-15 |
| 7622052 | Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation | Justin Quarantello, Karl Kasprzyk, Rob Stoya | 2009-11-24 |
| 7314402 | Method and apparatus for controlling slurry distribution | Guangying Zhang | 2008-01-01 |
| 7264537 | Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system | Karl Kasprzyk, Steven Campbell REYNOLDS, Paul Franzen, Justin Quarantello | 2007-09-04 |
| 7115017 | Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization | Justin Quarantello, Thomas Stotts, Paul Franzen | 2006-10-03 |
| 7004086 | Injection of overfire air through the upper furnace arch for penetration and mixing with flue gas | Donald K. Morrison, Paul Gregory Stonkus | 2006-02-28 |
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2005-11-01 |
| 6923711 | Multizone carrier with process monitoring system for chemical-mechanical planarization tool | Daniel Ray Trojan | 2005-08-02 |
| 6869354 | Zero cooling air flow overfire air injector and related method | William Theodore Lipinski, Peter V. Centore, George M. Gorring, James J. Jennings, Robert W. Waltz +4 more | 2005-03-22 |
| 6821794 | Flexible snapshot in endpoint detection | Mamoru Yamayoshi | 2004-11-23 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2004-10-19 |
| 6572445 | Multizone slurry delivery for chemical mechanical polishing tool | — | 2003-06-03 |
| 6555466 | Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers | Malcolm Grief, Krishna P. Murella, Sanjay Basak | 2003-04-29 |
| 6521537 | Modification to fill layers for inlaying semiconductor patterns | — | 2003-02-18 |
| 6387188 | Pad conditioning for copper-based semiconductor wafers | Malcolm Grief, Krishna P. Murella, Sanjay Basak | 2002-05-14 |
| 6258711 | Sacrificial deposit to improve damascene pattern planarization in semiconductor wafers | — | 2001-07-10 |
| 5505146 | Burner pattern to minimize sidewall corrosion potential | — | 1996-04-09 |
| 5205226 | Low NO.sub.x burner system | John B. Kitto, Jr., Roger J. Kleisley, Albert D. LaRue, Chris Latham | 1993-04-27 |