| 8153987 |
Automated calibration methodology for VUV metrology system |
Jeffrey B. Hurst, Phillip Walsh, Cristian Rivas, Dale A. Harrison |
2012-04-10 |
| 7663747 |
Contamination monitoring and control techniques for use with an optical metrology instrument |
Dale A. Harrison |
2010-02-16 |
| 7622310 |
Contamination monitoring and control techniques for use with an optical metrology instrument |
Dale A. Harrison |
2009-11-24 |
| 7342235 |
Contamination monitoring and control techniques for use with an optical metrology instrument |
Dale A. Harrison |
2008-03-11 |
| 6960115 |
Multiprobe detection system for chemical-mechanical planarization tool |
Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton |
2005-11-01 |
| 6805613 |
Multiprobe detection system for chemical-mechanical planarization tool |
Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton |
2004-10-19 |
| 6447370 |
Inline metrology device |
— |
2002-09-10 |
| 5942704 |
Brush plectrum for stringed instruments |
— |
1999-08-24 |