Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8153987 | Automated calibration methodology for VUV metrology system | Jeffrey B. Hurst, Phillip Walsh, Cristian Rivas, Dale A. Harrison | 2012-04-10 |
| 7663747 | Contamination monitoring and control techniques for use with an optical metrology instrument | Dale A. Harrison | 2010-02-16 |
| 7622310 | Contamination monitoring and control techniques for use with an optical metrology instrument | Dale A. Harrison | 2009-11-24 |
| 7342235 | Contamination monitoring and control techniques for use with an optical metrology instrument | Dale A. Harrison | 2008-03-11 |
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2005-11-01 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2004-10-19 |
| 6447370 | Inline metrology device | — | 2002-09-10 |
| 5942704 | Brush plectrum for stringed instruments | — | 1999-08-24 |