Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960115 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni | 2005-11-01 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Paul Holzapfel, Mark Meloni | 2004-10-19 |
| 6641462 | Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing | — | 2003-11-04 |
| 6549279 | Method and apparatus for optical endpoint calibration in CMP | John A. Adams, Charles Chen | 2003-04-15 |
| 6395130 | Hydrophobic optical endpoint light pipes for chemical mechanical polishing | John A. Adams, John C. Ptak | 2002-05-28 |
| 6361646 | Method and apparatus for endpoint detection for chemical mechanical polishing | Thomas F. A. Bibby, John A. Adams | 2002-03-26 |
| 6106662 | Method and apparatus for endpoint detection for chemical mechanical polishing | Thomas F. A. Bibby, John A. Adams, Christopher E. Barns, Charles Hannes | 2000-08-22 |
| 5415493 | Snow plow compatible speed bumps | — | 1995-05-16 |
| 5295759 | Snow plow compatible speed bumps | Stephen N. Flanders | 1994-03-22 |