Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9190796 | Apparatus for precision insertion | Corbin Gene Voigt, Michael Corliss, Alan Swan | 2015-11-17 |
| 6106662 | Method and apparatus for endpoint detection for chemical mechanical polishing | Thomas F. A. Bibby, John A. Adams, Robert A. Eaton, Charles Hannes | 2000-08-22 |
| 6095904 | Orbital motion chemical-mechanical polishing method and apparatus | Joseph R. Breivogel, Samuel F. Louke, Michael R. Oliver, Leopoldo D. Yau | 2000-08-01 |
| 6083089 | Method and apparatus for chemical mechanical polishing | Joseph R. Breivogel, Matthew J. Prince | 2000-07-04 |
| 5635083 | Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate | Joseph R. Breivogel, Matthew J. Prince | 1997-06-03 |
| 5554064 | Orbital motion chemical-mechanical polishing apparatus and method of fabrication | Joseph R. Breivogel, Samuel F. Louke, Michael R. Oliver, Leopoldo D. Yau | 1996-09-10 |
| 5547417 | Method and apparatus for conditioning a semiconductor polishing pad | Joseph R. Breivogel, Matthew J. Price | 1996-08-20 |
| 4271761 | High acceleration cable deployment system | Thomas N. Canning, James P. Murphy, Bobby Gin, Robert W. King | 1981-06-09 |