Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38674 | Process for forming a thin oxide layer | Robert S. Chau, William Hargrove | 2004-12-21 |
| 6326664 | Transistor with ultra shallow tip and method of fabrication | Robert S. Chau, Chan-Hong Chern, Chia-Hong Jan, Kevin R. Weldon, Paul Packan | 2001-12-04 |
| 6165826 | Transistor with low resistance tip and method of fabrication in a CMOS process | Robert S. Chau, Chia-Hong Jan, Chan-Hong Chern | 2000-12-26 |
| 6139404 | Apparatus and a method for conditioning a semiconductor wafer polishing pad | — | 2000-10-31 |
| 6095904 | Orbital motion chemical-mechanical polishing method and apparatus | Joseph R. Breivogel, Samuel F. Louke, Michael R. Oliver, Christopher E. Barns | 2000-08-01 |
| 5863832 | Capping layer in interconnect system and method for bonding the capping layer onto the interconnect system | Brian S. Doyle, Quat T. Yu | 1999-01-26 |
| 5856697 | Integrated dual layer emitter mask and emitter trench for BiCMOS processes | Stephen Chambers, Brian J. Brown, Chan-Hong Chern, Robert S. Chau | 1999-01-05 |
| 5783478 | Method of frabricating a MOS transistor having a composite gate electrode | Robert S. Chau, David B. Fraser, Kenneth Cadien, Gopal Raghavan | 1998-07-21 |
| 5710450 | Transistor with ultra shallow tip and method of fabrication | Robert S. Chau, Chan-Hong Chern, Chia-Hong Jan, Kevin R. Weldon, Paul Packan | 1998-01-20 |
| 5625217 | MOS transistor having a composite gate electrode and method of fabrication | Robert S. Chau, David B. Fraser, Kenneth Cadien, Gopal Raghavan | 1997-04-29 |
| 5611943 | Method and apparatus for conditioning of chemical-mechanical polishing pads | Kenneth Cadien | 1997-03-18 |
| 5595526 | Method and apparatus for endpoint detection in a chemical/mechanical process for polishing a substrate | Paul B. Fischer | 1997-01-21 |
| 5554064 | Orbital motion chemical-mechanical polishing apparatus and method of fabrication | Joseph R. Breivogel, Samuel F. Louke, Michael R. Oliver, Christopher E. Barns | 1996-09-10 |
| 5488003 | Method of making emitter trench BiCMOS using integrated dual layer emitter mask | Stephen Chambers, Brian J. Brown, Chan-Hong Chern, Robert S. Chau | 1996-01-30 |
| 5434093 | Inverted spacer transistor | Robert S. Chau, Chan-Hong Chern, Shahriar Ahmed, Robert Hainsey, Robert J. Stoner +1 more | 1995-07-18 |
| 5244843 | Process for forming a thin oxide layer | Robert S. Chau, William Hargrove | 1993-09-14 |
| 5104819 | Fabrication of interpoly dielctric for EPROM-related technologies | Philip E. Freiberger, Cheng Pan, George E. Sery | 1992-04-14 |
| 4917044 | Electrical contact apparatus for use with plasma or glow discharge reaction chamber | Galen H. Kawamoto | 1990-04-17 |
| 4837185 | Pulsed dual radio frequency CVD process | Galen H. Kawamoto | 1989-06-06 |
| 4786612 | Plasma enhanced chemical vapor deposited vertical silicon nitride resistor | Shih-Ou Chen, Yih-Shung Lin | 1988-11-22 |
| 4755480 | Method of making a silicon nitride resistor using plasma enhanced chemical vapor deposition | Shih-Ou Chen, Yih-Shung Lin | 1988-07-05 |
| 4690728 | Pattern delineation of vertical load resistor | Chi-Hwa Tsang, Galen H. Kawamoto | 1987-09-01 |
| 4620986 | MOS rear end processing | Robert A. Gasser, Kenneth R. Week, Jr., Jick Yu, David D. Chin | 1986-11-04 |
| 4587138 | MOS rear end processing | Robert A. Gasser, Kenneth R. Week, Jr., Jick Yu, David D. Chin | 1986-05-06 |