| 10641749 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2020-05-05 |
| 10338040 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2019-07-02 |
| 10302607 |
Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatography |
Dale A. Harrison, Sean Jameson |
2019-05-28 |
| 9976996 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2018-05-22 |
| 9891197 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2018-02-13 |
| 9696286 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2017-07-04 |
| 9465015 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2016-10-11 |
| 9310292 |
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy |
Anthony T. Hayes, Dale A. Harrison |
2016-04-12 |
| 9116158 |
Vacuum ultraviolet absorption spectroscopy system and method |
Dale A. Harrison, Anthony T. Hayes |
2015-08-25 |
| 8867041 |
Optical vacuum ultra-violet wavelength nanoimprint metrology |
Jeffrey B. Hurst, Dale A. Harrison |
2014-10-21 |
| 8773662 |
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy |
Anthony T. Hayes, Dale A. Harrison |
2014-07-08 |
| 8564780 |
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces |
Dale A. Harrison |
2013-10-22 |
| 8153987 |
Automated calibration methodology for VUV metrology system |
Jeffrey B. Hurst, Matthew Weldon, Cristian Rivas, Dale A. Harrison |
2012-04-10 |
| 7990549 |
Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation |
— |
2011-08-02 |
| 7948631 |
Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths |
— |
2011-05-24 |
| 7663097 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
Dale A. Harrison |
2010-02-16 |
| 7511265 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
Dale A. Harrison |
2009-03-31 |
| 7349103 |
System and method for high intensity small spot optical metrology |
Mehdi Balooch, Marc Aho, Homan Amin, Abdul Rahim Forouhi, Guoguang Li |
2008-03-25 |
| 7282703 |
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
Dale A. Harrison |
2007-10-16 |
| 7253909 |
Phase shift measurement using transmittance spectra |
Guoguang Li, Shuqiang Chen, Abdul Rahim Forouhi |
2007-08-07 |
| 7212293 |
Optical determination of pattern feature parameters using a scalar model having effective optical properties |
Guoguang Li, Shuqiang Chen |
2007-05-01 |
| 6891628 |
Method and apparatus for examining features on semi-transparent and transparent substrates |
Guoguang Li, Abdul Rahim Forouhi |
2005-05-10 |
| 4654761 |
Periscopic vehicle lamp lens and lens arrangement including same |
— |
1987-03-31 |
