Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10641749 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2020-05-05 |
| 10338040 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2019-07-02 |
| 10302607 | Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatography | Dale A. Harrison, Sean Jameson | 2019-05-28 |
| 9976996 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2018-05-22 |
| 9891197 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2018-02-13 |
| 9696286 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2017-07-04 |
| 9465015 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2016-10-11 |
| 9310292 | Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy | Anthony T. Hayes, Dale A. Harrison | 2016-04-12 |
| 9116158 | Vacuum ultraviolet absorption spectroscopy system and method | Dale A. Harrison, Anthony T. Hayes | 2015-08-25 |
| 8867041 | Optical vacuum ultra-violet wavelength nanoimprint metrology | Jeffrey B. Hurst, Dale A. Harrison | 2014-10-21 |
| 8773662 | Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy | Anthony T. Hayes, Dale A. Harrison | 2014-07-08 |
| 8564780 | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces | Dale A. Harrison | 2013-10-22 |
| 8153987 | Automated calibration methodology for VUV metrology system | Jeffrey B. Hurst, Matthew Weldon, Cristian Rivas, Dale A. Harrison | 2012-04-10 |
| 7990549 | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation | — | 2011-08-02 |
| 7948631 | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths | — | 2011-05-24 |
| 7663097 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement | Dale A. Harrison | 2010-02-16 |
| 7511265 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement | Dale A. Harrison | 2009-03-31 |
| 7349103 | System and method for high intensity small spot optical metrology | Mehdi Balooch, Marc Aho, Homan Amin, Abdul Rahim Forouhi, Guoguang Li | 2008-03-25 |
| 7282703 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement | Dale A. Harrison | 2007-10-16 |
| 7253909 | Phase shift measurement using transmittance spectra | Guoguang Li, Shuqiang Chen, Abdul Rahim Forouhi | 2007-08-07 |
| 7212293 | Optical determination of pattern feature parameters using a scalar model having effective optical properties | Guoguang Li, Shuqiang Chen | 2007-05-01 |
| 6891628 | Method and apparatus for examining features on semi-transparent and transparent substrates | Guoguang Li, Abdul Rahim Forouhi | 2005-05-10 |
| 4654761 | Periscopic vehicle lamp lens and lens arrangement including same | — | 1987-03-31 |