Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999936 | Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle density | Guoguang Li, Erik Nackerud | 2011-08-16 |
| 7397030 | Integrated local and global optical metrology for samples having miniature features | Mehdi Balooch | 2008-07-08 |
| 7349103 | System and method for high intensity small spot optical metrology | Mehdi Balooch, Marc Aho, Homan Amin, Phillip Walsh, Guoguang Li | 2008-03-25 |
| 7330256 | Spectrophotometric system with reduced angle of incidence | Marc Aho | 2008-02-12 |
| 7327457 | Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes | Ray Hebert, Marc Aho | 2008-02-05 |
| 7289214 | System and method for measuring overlay alignment using diffraction gratings | Guoguang Li, Shuqiang Chen | 2007-10-30 |
| 7253909 | Phase shift measurement using transmittance spectra | Guoguang Li, Phillip Walsh, Shuqiang Chen | 2007-08-07 |
| 7248364 | Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size | Ray Hebert, Marc Aho | 2007-07-24 |
| 6891628 | Method and apparatus for examining features on semi-transparent and transparent substrates | Guoguang Li, Phillip Walsh | 2005-05-10 |
| 6825933 | Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoring | Jeff Roberts | 2004-11-30 |
| 6710865 | Method of inferring optical parameters outside of a measurement spectral range | Dale A. Harrison, Erik Maiken, John Lam | 2004-03-23 |
| 6594025 | Method of monitoring thin-film processes and metrology tool thereof | Dale A. Harrison, Eric Maiken, John Lam | 2003-07-15 |
| 6392756 | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate | Guoguang Li, Hongwei Zhu, Dale A. Harrison, Weilu Xu | 2002-05-21 |
| 6379014 | Graded anti-reflective coatings for photolithography | Guoguang Li, Dale A. Harrison | 2002-04-30 |
| 6327035 | Method and apparatus for optically examining miniature patterns | Guoguang Li, Dale A. Harrison | 2001-12-04 |
| 6128085 | Reflectance spectroscopic apparatus with toroidal mirrors | Dale Buermann, Michael J. Mandella | 2000-10-03 |
| 6091485 | Method and apparatus for optically determining physical parameters of underlayers | Guoguang Li, Hongwei Zhu, Dale A. Harrison, Weilu Xu | 2000-07-18 |
| 6075612 | Optical devices having toroidal mirrors for performing reflectance measurements | Michael J. Mandella, Dale Buermann | 2000-06-13 |
| 5991022 | Reflectance spectrophotometric apparatus with toroidal mirrors | Dale Buermann, Michael J. Mandella | 1999-11-23 |
| 5880831 | Reflectance spectrophotometric apparatus with optical relay | Dale Buermann, Michael J. Mandella | 1999-03-09 |
| 5825072 | Circuits for ESD Protection of metal to-metal antifuses during processing | Yeochung Yen, Wenn-Jei Chen, Steve S. Chiang | 1998-10-20 |
| 5780323 | Fabrication method for metal-to-metal antifuses incorporating a tungsten via plug | Frank Hawley, John McCollum, Yeouchung Yen | 1998-07-14 |
| 5770885 | Electrically programmable antifuse incorporating dielectric and amorphous silicon interlayers | John McCollum, Abdelshafy A. Eltoukhy | 1998-06-23 |
| 5763898 | Above via metal-to-metal antifuses incorporating a tungsten via plug | Frank Hawley, John McCollum, Yeouchung Yen | 1998-06-09 |
| 5753528 | Method of fabricating metal-to-metal antifuse with improved diffusion barrier layer | Iton Wang | 1998-05-19 |