Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7349103 | System and method for high intensity small spot optical metrology | Mehdi Balooch, Marc Aho, Abdul Rahim Forouhi, Phillip Walsh, Guoguang Li | 2008-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7349103 | System and method for high intensity small spot optical metrology | Mehdi Balooch, Marc Aho, Abdul Rahim Forouhi, Phillip Walsh, Guoguang Li | 2008-03-25 |