Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9624578 | Method for RF compensation in plasma assisted atomic layer deposition | Jun Qian, Frank L. Pasquale, Adrien LaVoie, Chloe Baldasseroni, Hu Kang +7 more | 2017-04-18 |
| 9007059 | Methods for monitoring thickness of a conductive layer | Sudeep Kumar Lahiri | 2015-04-14 |
| 8106651 | Methods and apparatuses for determining thickness of a conductive layer | Sudeep Kumar Lahiri | 2012-01-31 |
| 7887392 | Platen assembly and work piece carrier head employing flexible circuit sensor | — | 2011-02-15 |
| 7811153 | High throughput servo load cup with integrated wet chemistry delivery | Rich Blank, Peter Thaulad, Wayne Tang, Kevin Bertsch, Ken Reynolds | 2010-10-12 |
| 7428470 | Method for monitoring edge exclusion during chemical mechanical planarization | Brian J. Brown | 2008-09-23 |
| 7264537 | Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system | Thomas Laursen, Karl Kasprzyk, Steven Campbell REYNOLDS, Justin Quarantello | 2007-09-04 |
| 7115017 | Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization | Thomas Laursen, Justin Quarantello, Thomas Stotts | 2006-10-03 |