Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7622052 | Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation | Thomas Laursen, Karl Kasprzyk, Rob Stoya | 2009-11-24 |
| 7264537 | Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system | Thomas Laursen, Karl Kasprzyk, Steven Campbell REYNOLDS, Paul Franzen | 2007-09-04 |
| 7115017 | Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization | Thomas Laursen, Thomas Stotts, Paul Franzen | 2006-10-03 |
| 6892472 | Method and apparatus for cleaning and drying a workpiece | — | 2005-05-17 |