Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8261758 | Apparatus and method for cleaning and removing liquids from front and back sides of a rotating workpiece | Vishwas Hardikar, Migdad Selimovic | 2012-09-11 |
| 7811153 | High throughput servo load cup with integrated wet chemistry delivery | Rich Blank, Peter Thaulad, Wayne Tang, Paul Franzen, Ken Reynolds | 2010-10-12 |
| 7229339 | CMP apparatus and method | John F. Stumpf, Franklin D. Root, Brian Severson, David Marquardt, John D. Herb +6 more | 2007-06-12 |