Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496159 | Wafer position correction with a dual, side-by-side wafer transfer robot | Damon Tyrone Genetti, Shawn M. Hamilton, James S. Templeton | 2016-11-15 |
| 9002514 | Wafer position correction with a dual, side-by-side wafer transfer robot | Damon Tyrone Genetti, Shawn M. Hamilton, Sheldon Templeton | 2015-04-07 |
| 8757345 | Magnetic rotational hardstop for robot | Jim Roberts, Wayne Tang, Michael Bergeson | 2014-06-24 |
| 8430620 | Dedicated hot and cold end effectors for improved throughput | — | 2013-04-30 |
| 7811153 | High throughput servo load cup with integrated wet chemistry delivery | Peter Thaulad, Wayne Tang, Kevin Bertsch, Paul Franzen, Ken Reynolds | 2010-10-12 |