CL

Christopher J. Lichner

SP Speedfam-Ipec: 2 patents #50 of 143Top 35%
Overall (All Time): #2,227,191 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6241226 Vacuum system coupled to a wafer chuck for holding wet wafers Gregory A. Olsen, Phillip M. Rayer, II, Chad J. Voelkers 2001-06-05
6102784 Method and apparatus for improved gear cleaning assembly in polishing machines 2000-08-15