Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241226 | Vacuum system coupled to a wafer chuck for holding wet wafers | Gregory A. Olsen, Christopher J. Lichner, Phillip M. Rayer, II | 2001-06-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241226 | Vacuum system coupled to a wafer chuck for holding wet wafers | Gregory A. Olsen, Christopher J. Lichner, Phillip M. Rayer, II | 2001-06-05 |