Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7018276 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, Cangshan Xu, David Wei | 2006-03-28 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang +4 more | 2005-05-24 |
| 6896600 | Liquid dispense manifold for chemical-mechanical polisher | Patrick P. Wu, Xuyen Pham | 2005-05-24 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, Cangshan Xu, David Wei | 2004-07-13 |
| 6712670 | Method and apparatus for applying downward force on wafer during CMP | Anthony de la Llera, Xuyen Pham, Andrew Siu, Tuan Nguyen | 2004-03-30 |
| 6666755 | Belt wiper for a chemical mechanical planarization system | Travis R. Taylor, Christian DiPietro, Stephen Jew, Philip Ngoon, Katgenahalli Y. Ramanujam | 2003-12-23 |