Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8607806 | Megasonic precision cleaning of semiconductor process equipment components and parts | Yaobo Yin | 2013-12-17 |
| 8327861 | Megasonic precision cleaning of semiconductor process equipment components and parts | Yaobo Yin | 2012-12-11 |
| 7578889 | Methodology for cleaning of surface metal contamination from electrode assemblies | Hong Shih, Yaobo Yin, Shun Wu, Armen Avoyan, John Daugherty | 2009-08-25 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6319330 | Method and apparatus for cleaning low K dielectric and metal wafer surfaces | Diane Hymes | 2001-11-20 |
| 6277203 | Method and apparatus for cleaning low K dielectric and metal wafer surfaces | Diane Hymes | 2001-08-21 |