Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8607806 | Megasonic precision cleaning of semiconductor process equipment components and parts | Linda (Tong) Jiang | 2013-12-17 |
| 8327861 | Megasonic precision cleaning of semiconductor process equipment components and parts | Linda (Tong) Jiang | 2012-12-11 |
| 8215321 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Jason Augustino, Catherine Zhou, Armen Avoyan | 2012-07-10 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Jason Augustino, Catherine Zhou, Armen Avoyan | 2011-05-17 |
| 7578889 | Methodology for cleaning of surface metal contamination from electrode assemblies | Hong Shih, Shun Wu, Armen Avoyan, John Daugherty, Linda (Tong) Jiang | 2009-08-25 |