Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7578889 | Methodology for cleaning of surface metal contamination from electrode assemblies | Hong Shih, Yaobo Yin, Armen Avoyan, John Daugherty, Linda (Tong) Jiang | 2009-08-25 |
| 7055732 | Semiconductor processing apparatus including plasma-resistant, welded aluminum structures | Senh Thach, Jennifer Y. Sun, Yixing Lin, Clifford Stow | 2006-06-06 |
| 7048814 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Brian T. West, Hong Wang, Jennifer Y. Sun, Clifford Stow +1 more | 2006-05-23 |
| 7033447 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Brian T. West, Clifford Stow, Senh Thach, Hong Wang +1 more | 2006-04-25 |
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Jennifer Y. Sun, Senh Thach, Ananda H. Kumar, Robert Wu, Hong Wang +2 more | 2004-08-17 |
| 6713188 | Clean aluminum alloy for semiconductor processing equipment | Clifford Stow, Hong Wang, Yixing Lin, Brian T. West | 2004-03-30 |
| 6659331 | Plasma-resistant, welded aluminum structures for use in semiconductor apparatus | Senh Thach, Jennifer Y. Sun, Yixing Lin, Clifford Stow | 2003-12-09 |
| 6565984 | Clean aluminum alloy for semiconductor processing equipment | Clifford Stow, Hong Wang, Yixing Lin | 2003-05-20 |
| 6199927 | Robot blade for handling of semiconductor substrates | Behzad Shamlou, Wen-Chiang Tu, Xuyen Pham, Yu-Chia Chang, Daniel O. Clark | 2001-03-13 |
| 6175485 | Electrostatic chuck and method for fabricating the same | Padmanabhan Krishnaraj, Brian Lue, Ramkishan Rao Lingampalli | 2001-01-16 |
| 6024393 | Robot blade for handling of semiconductor substrate | Behzad Shamlou, Wen-Chiang Tu, Xuyen Pham, Yu-Chia Chang, Daniel O. Clark | 2000-02-15 |