Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8403727 | Pre-planarization system and method | Fred C. Redeker, John M. Boyd, Yezdi Dordi, Simon McClatchie | 2013-03-26 |
| 7040970 | Apparatus and method for distributing a polishing fluid | Simon McClatchie, Ren Zhou, Xuyen Pham, Tuan Nguyen | 2006-05-09 |
| 6953391 | Methods for reducing slurry usage in a linear chemical mechanical planarization system | Cangshan Xu, Zhefei J. Chen | 2005-10-11 |