Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8403727 | Pre-planarization system and method | Fred C. Redeker, John M. Boyd, Yezdi Dordi, Sabir A. Majumder | 2013-03-26 |
| 7129167 | Methods and systems for a stress-free cleaning a surface of a substrate | Andrew D. Bailey, III, Shrikant Lohokare, Yunsang Kim | 2006-10-31 |
| 7040954 | Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing | Peter Norton, Xuyen Pham, Ren Zhou | 2006-05-09 |
| 7040970 | Apparatus and method for distributing a polishing fluid | Sabir A. Majumder, Ren Zhou, Xuyen Pham, Tuan Nguyen | 2006-05-09 |
| 6988934 | Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system | Gregory C. Lee, John M. Boyd | 2006-01-24 |
| 6242366 | Methods and apparatus for treating a semiconductor substrate | Knut Beekman, Adrian Kiermasz, Mark P. Taylor, Peter Leslie Timms | 2001-06-05 |