Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8480060 | Crane cable roller assembly | — | 2013-07-09 |
| 6988934 | Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system | Simon McClatchie, John M. Boyd | 2006-01-24 |
| 6517426 | Composite polishing pad for chemical-mechanical polishing | — | 2003-02-11 |
| 6322429 | Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus | Ethan C. Wilson, James A. Allen, David E. Weldon, Linh X. Can, Jeffrey M. L. Fontana +2 more | 2001-11-27 |
| 6315857 | Polishing pad shaping and patterning | Tsungnan Cheng, Ethan C. Wilson, Shou-Sung Chang, Huey-Ming Tzeng, David E. Weldon +3 more | 2001-11-13 |
| 6159083 | Polishing head for a chemical mechanical polishing apparatus | Gregory A. Appel, Charles J. Regan, David E. Weldon, Shou-Sung Chang | 2000-12-12 |
| 6042457 | Conditioner assembly for a chemical mechanical polishing apparatus | Ethan C. Wilson, James A. Allen, David E. Weldon, Linh X. Can, Jeffrey M. L. Fontana +2 more | 2000-03-28 |
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Greg Simon, Harry W. Lee, Jr. +5 more | 1999-12-14 |