| 8480060 |
Crane cable roller assembly |
— |
2013-07-09 |
| 6988934 |
Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system |
Simon McClatchie, John M. Boyd |
2006-01-24 |
| 6517426 |
Composite polishing pad for chemical-mechanical polishing |
— |
2003-02-11 |
| 6322429 |
Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus |
Ethan C. Wilson, James A. Allen, David E. Weldon, Linh X. Can, Jeffrey M. L. Fontana +2 more |
2001-11-27 |
| 6315857 |
Polishing pad shaping and patterning |
Tsungnan Cheng, Ethan C. Wilson, Shou-Sung Chang, Huey-Ming Tzeng, David E. Weldon +3 more |
2001-11-13 |
| 6159083 |
Polishing head for a chemical mechanical polishing apparatus |
Gregory A. Appel, Charles J. Regan, David E. Weldon, Shou-Sung Chang |
2000-12-12 |
| 6042457 |
Conditioner assembly for a chemical mechanical polishing apparatus |
Ethan C. Wilson, James A. Allen, David E. Weldon, Linh X. Can, Jeffrey M. L. Fontana +2 more |
2000-03-28 |
| 6000997 |
Temperature regulation in a CMP process |
Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Greg Simon, Harry W. Lee, Jr. +5 more |
1999-12-14 |
