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Greg Simon — 1 Patent

APAplex: 1 patents #20 of 32Top 65%

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Patent #	Title	Co-Inventors	Date
6000997	Temperature regulation in a CMP process	Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Gregory C. Lee, Harry W. Lee, Jr. +5 more	1999-12-14