Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Gregory C. Lee, Harry W. Lee, Jr. +5 more | 1999-12-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Gregory C. Lee, Harry W. Lee, Jr. +5 more | 1999-12-14 |