Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159083 | Polishing head for a chemical mechanical polishing apparatus | Charles J. Regan, David E. Weldon, Shou-Sung Chang, Gregory C. Lee | 2000-12-12 |
| 6149512 | Linear pad conditioning apparatus | Ethan C. Wilson, H. Alexander Anderson | 2000-11-21 |
| 6080040 | Wafer carrier head with inflatable bladder and attack angle control for polishing | Ethan C. Wilson, Shou-Sung Chang | 2000-06-27 |
| 6062961 | Wafer polishing head drive | Linh X. Can, Kelvin Lum | 2000-05-16 |
| 6000997 | Temperature regulation in a CMP process | Shu-Hsin Kao, Shou-Sung Chang, Huey-Ming Tzeng, Gregory C. Lee, Greg Simon +5 more | 1999-12-14 |