Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6726429 | Local store for a wafer processing station | James Sackett, David E. Weldon | 2004-04-27 |
| 6149512 | Linear pad conditioning apparatus | Ethan C. Wilson, Gregory A. Appel | 2000-11-21 |
| 5957764 | Modular wafer polishing apparatus and method | Linh X. Can, Tsungnan Cheng, Garry K. Kwong, Albert Hu, David Z. Chen +1 more | 1999-09-28 |
| 5947802 | Wafer shuttle system | John Zhang | 1999-09-07 |
| 5935768 | Method of processing a substrate in a photolithography system utilizing a thermal process module | Michael R. Biche | 1999-08-10 |
| 5651823 | Clustered photolithography system | Michael L. Parodi, Michael R. Biche, Alexander Lurye | 1997-07-29 |
| 5553994 | Thermal process module for substrate coat/develop system | Michael R. Biche | 1996-09-10 |