Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5798140 | Oscillatory chuck method and apparatus for coating flat substrates | Roy E. Hurtig | 1998-08-25 |
| 5766824 | Method and apparatus for curing photoresist | William T. Batchelder, Michael R. Biche | 1998-06-16 |
| 5651823 | Clustered photolithography system | Michael R. Biche, H. Alexander Anderson, Alexander Lurye | 1997-07-29 |