Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651823 | Clustered photolithography system | Michael L. Parodi, Michael R. Biche, H. Alexander Anderson | 1997-07-29 |
| 5443348 | Cassette input/output unit for semiconductor processing system | Michael R. Biche | 1995-08-22 |