Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6544338 | Inverted hot plate cure module | Fred J. Chetcuti, Lawrence Gochberg | 2003-04-08 | $53,210,000 |
| 6483081 | In-line cure furnace and method for using the same | — | 2002-11-19 | $69,235,000 |
| 5885661 | Droplet jet method for coating flat substrates with resist or similar materials | — | 1999-03-23 | |
| 5766824 | Method and apparatus for curing photoresist | Michael L. Parodi, Michael R. Biche | 1998-06-16 | $8,782,000 |
| 5472502 | Apparatus and method for spin coating wafers and the like | — | 1995-12-05 | $9,269,000 |
| 4647172 | Resist development method | John A. Piatt, Kenneth M. Sautter | 1987-03-03 | $429,000 |