Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929831 | Methods of forming nitride films | Jashu Patel | 2005-08-16 |
| 6905962 | Method of depositing a layer | Paul Rich, Claire Wiggins | 2005-06-14 |
| 6831010 | Method and depositing a layer | Paul Rich, Claire Wiggins | 2004-12-14 |
| 6627535 | Methods and apparatus for forming a film on a substrate | John MacNeil, Robert John Wilby | 2003-09-30 |
| 6544858 | Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation | Jashu Patel | 2003-04-08 |
| 6242366 | Methods and apparatus for treating a semiconductor substrate | Adrian Kiermasz, Simon McClatchie, Mark P. Taylor, Peter Leslie Timms | 2001-06-05 |