Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929831 | Methods of forming nitride films | Knut Beekman | 2005-08-16 |
| 6544858 | Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation | Knut Beekman | 2003-04-08 |