Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936481 | Method of depositing dielectric | — | 2005-08-30 |
| 6905962 | Method of depositing a layer | Knut Beekman, Paul Rich | 2005-06-14 |
| 6831010 | Method and depositing a layer | Knut Beekman, Paul Rich | 2004-12-14 |