{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "CMP belt stretch compensation apparatus and methods for using the same", "item": "https://www.patentleaderboard.com/patent/6878048"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › CMP belt stretch compensation apparatus and methods for using the same

CMP belt stretch compensation apparatus and methods for using the same

US Patent 6878048 · Granted Apr 12, 2005

Estimated economic value: $18,280,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pillar-supported array of micro electron lenses2015
Sharp scattering angle trap for electron beam apparatus2014
Inline inspection of photovoltaics for electrical defects2013
Wet surface treatment by usage of a liquid bath containing energy limited bubble2012
Methods and apparatus for thin metal film thickness measurement2012
Tungsten plug deposition quality evaluation method by EBACE technology2011
Inline inspection of photovoltaics for electrical defects2011
Wafer electrical discharge control using argon free dechucking gas2011
Method for making semiconductor structures implementing sacrificial material2011
Method for making semiconductor structures implementing sacrificial material2011
Lag control2010
Dynamic pattern generator with cup-shaped structure2010