{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Air platen for leading edge and trailing edge control", "item": "https://www.patentleaderboard.com/patent/6761626"}]}
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Home › Air platen for leading edge and trailing edge control

Air platen for leading edge and trailing edge control

US Patent 6761626 · Granted Jul 13, 2004

Estimated economic value: $27,917,000 ⓘ

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