Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7789991 | Lag control | Sean S. Kang, David Wei, Vinay Pohray, Bi-Ming Yen | 2010-09-07 |
| 7442649 | Etch with photoresist mask | Jisoo Kim, Sangheon Lee, Robert Charatan, S.M. Reza Sadjadi | 2008-10-28 |
| 7307025 | Lag control | Sean S. Kang, David Wei, Vinay Pohray, Bi-Ming Yen | 2007-12-11 |
| 7078350 | Methods for the optimization of substrate etching in a plasma processing system | Jisoo Kim, Bi-Ming Yen, Peter Loewenhardt | 2006-07-18 |
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Sean S. Kang, Bi-Ming Yen, Reza Sadjadi +1 more | 2005-12-27 |