Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976261 | Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment | Mehrdad M. Moslehi, Yong Jin Lee | 1999-11-02 |
| 5937142 | Multi-zone illuminator for rapid thermal processing | Mehrdad M. Moslehi, Yong Jin Lee, William Messner | 1999-08-10 |
| 5324684 | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure | Kristian E. Johnsgard, Carl Galewski | 1994-06-28 |
| 5002630 | Method for high temperature thermal processing with reduced convective heat loss | Mike Robertson, Yen-Hui Ku, Fred Wong | 1991-03-26 |
| 4984902 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Stephan Lassig, Noel H. Johnson, Gary R. Rickords | 1991-01-15 |
| 4969748 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Stephan Lassig, Noel H. Johnson, Gary R. Rickords | 1990-11-13 |
| 4755654 | Semiconductor wafer heating chamber | John L. Crowley, Thomas J. DeBolski, Stephan Lassig | 1988-07-05 |