Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7439188 | Reactor with heated and textured electrodes and surfaces | Stephen P. DeOrnellas, Leslie G. Jerde | 2008-10-21 |
| 7223699 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail | 2007-05-29 |
| 6905969 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail | 2005-06-14 |
| 6774046 | Method for minimizing the critical dimension growth of a feature on a semiconductor wafer | Stephen P. DeOrnellas, Alferd Cofer, Leslie G. Jerde, Paritosh Rajora | 2004-08-10 |
| 6620335 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail | 2003-09-16 |
| 6500314 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail | 2002-12-31 |
| 6354240 | Plasma etch reactor having a plurality of magnets | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail | 2002-03-12 |
| 6046116 | Method for minimizing the critical dimension growth of a feature on a semiconductor wafer | Stephen P. DeOrnellas, Alfred Cofer, Leslie G. Jerde, Paritosh Rajora | 2000-04-04 |
| 5548470 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | Anwar Husain, David E. Kotecki, Stephan Lassig, Anthony J. Ricci | 1996-08-20 |