Kurt A. Olson — 9 Patents at Tegal

Kurt A. Olson has been granted 9 US patents while listed as an inventor at Tegal. The first was granted in 1996 and the most recent in October 2008. Kurt A. Olson ranks #535,341 of 4,157,543 US inventors in our database (top 12.9%). Patent records list Kurt A. Olson in Sebastopol, CA, US.

Patents per Year

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7439188	Reactor with heated and textured electrodes and surfaces	Stephen P. DeOrnellas, Leslie G. Jerde	2008-10-21	$359,000
7223699	Plasma etch reactor and method	Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail	2007-05-29	$453,000
6905969	Plasma etch reactor and method	Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail	2005-06-14	$1,116,000
6774046	Method for minimizing the critical dimension growth of a feature on a semiconductor wafer	Stephen P. DeOrnellas, Alferd Cofer, Leslie G. Jerde, Paritosh Rajora	2004-08-10	$1,193,000
6620335	Plasma etch reactor and method	Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail	2003-09-16	$837,000
6500314	Plasma etch reactor and method	Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail	2002-12-31	$236,000
6354240	Plasma etch reactor having a plurality of magnets	Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Robert C. Vail	2002-03-12	$363,000
6046116	Method for minimizing the critical dimension growth of a feature on a semiconductor wafer	Stephen P. DeOrnellas, Alfred Cofer, Leslie G. Jerde, Paritosh Rajora	2000-04-04	$2,621,000
5548470	Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity	Anwar Husain, David E. Kotecki, Stephan Lassig, Anthony J. Ricci	1996-08-20	$9,974,000

Kurt A. Olson — 9 Patents

Patents per Year

Issued Patents All Time

Patent Widget