| 7439188 |
Reactor with heated and textured electrodes and surfaces |
Stephen P. DeOrnellas, Kurt A. Olson |
2008-10-21 |
| 7223699 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson |
2007-05-29 |
| 6958295 |
Method for using a hard mask for critical dimension growth containment |
Stephen P. DeOrnellas, Alferd Cofer |
2005-10-25 |
| 6951820 |
Method for using a hard mask for critical dimension growth containment |
Stephen P. DeOrnellas, Alferd Cofer |
2005-10-04 |
| 6905969 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson |
2005-06-14 |
| 6774046 |
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer |
Stephen P. DeOrnellas, Alferd Cofer, Kurt A. Olson, Paritosh Rajora |
2004-08-10 |
| 6620335 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson |
2003-09-16 |
| 6500314 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson |
2002-12-31 |
| 6486069 |
Cobalt silicide etch process and apparatus |
Steven Marks, Stephen P. DeOrnellas |
2002-11-26 |
| 6406925 |
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
Satish D. Athavale, John A. Meyer |
2002-06-18 |
| 6391148 |
Cobalt silicide etch process and apparatus |
Steven Marks, Stephen P. DeOrnellas |
2002-05-21 |
| 6354240 |
Plasma etch reactor having a plurality of magnets |
Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson |
2002-03-12 |
| 6346428 |
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
Satish D. Athavale, John A. Meyer |
2002-02-12 |
| 6287975 |
Method for using a hard mask for critical dimension growth containment |
Stephen P. DeOrnellas, Alferd Cofer |
2001-09-11 |
| 6046116 |
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer |
Stephen P. DeOrnellas, Alfred Cofer, Kurt A. Olson, Paritosh Rajora |
2000-04-04 |
| 4491499 |
Optical emission end point detector |
Earl R. Lory, Kevin A. Muething, Len Y. Tsou |
1985-01-01 |
| 4253907 |
Anisotropic plasma etching |
Peter D. Parry |
1981-03-03 |