| 7223699 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson |
2007-05-29 |
| 6905969 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson |
2005-06-14 |
| 6620335 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson |
2003-09-16 |
| 6500314 |
Plasma etch reactor and method |
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson |
2002-12-31 |
| 6410448 |
Plasma etch reactor and method for emerging films |
Stephen P. DeOrnellas, Alferd Cofer |
2002-06-25 |
| 6354240 |
Plasma etch reactor having a plurality of magnets |
Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson |
2002-03-12 |
| 6190496 |
Plasma etch reactor and method for emerging films |
Stephen P. DeOrnellas, Alferd Cofer |
2001-02-20 |
| 6048435 |
Plasma etch reactor and method for emerging films |
Stephen P. DeOrnellas, Alferd Cofer |
2000-04-11 |